Invention Grant
- Patent Title: Liquid composition for etching oxides comprising indium, zinc, tin, and oxygen and etching method
-
Application No.: US15116626Application Date: 2015-01-21
-
Publication No.: US10023797B2Publication Date: 2018-07-17
- Inventor: Mari Shigeta , Kunio Yube
- Applicant: MITSUBISHI GAS CHEMICAL COMPANY, INC.
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
- Current Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, PLC
- Priority: JP2014-027293 20140217
- International Application: PCT/JP2015/051498 WO 20150121
- International Announcement: WO2015/122250 WO 20150820
- Main IPC: C09K13/06
- IPC: C09K13/06 ; C09K13/04 ; G02F1/1343 ; H01L33/00 ; H01L33/36 ; H01L21/306

Abstract:
Provided is a liquid etching composition that etches an oxide comprising indium, zinc, tin and oxygen at a preferable etching rate, without the etching rate being changed much along with the dissolution of the oxide, and with no substantial generation of deposit, and corrodes wiring materials at such a low level to be ignorable. The present invention uses a liquid etching composition comprising (A) at least one selected from the group consisting of sulfuric acid, methanesulfonic acid, and a salt of any of these acids; and water; the liquid etching composition having a pH value of −1 to 3.
Public/Granted literature
- US20160348001A1 LIQUID COMPOSITION FOR ETCHING OXIDES COMPRISING INDIUM, ZINC, TIN, AND OXYGEN AND ETCHING METHOD Public/Granted day:2016-12-01
Information query