Invention Grant
- Patent Title: Slit valve apparatus, systems, and methods
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Application No.: US13608389Application Date: 2012-09-10
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Publication No.: US10023954B2Publication Date: 2018-07-17
- Inventor: John J. Mazzocco , Dale Robert Du Bois , Juan Carlos Rocha-Alvarez
- Applicant: John J. Mazzocco , Dale Robert Du Bois , Juan Carlos Rocha-Alvarez
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: C23C16/44
- IPC: C23C16/44 ; H01L21/67 ; C23C14/56 ; C23C16/54 ; F16K51/02 ; F16K3/02 ; F16K3/16 ; F16K3/22 ; F16K3/314
Abstract:
Slit valve apparatuses are described. In one aspect, a slit valve apparatus is disclosed having a gate with at least one sealing surface, a blocker element, and a connector member that structurally connects the gate and the blocker element. Systems and methods including the slit valve apparatus are also disclosed, as are numerous other aspects.
Public/Granted literature
- US20130068391A1 SLIT VALVE APPARATUS, SYSTEMS, AND METHODS Public/Granted day:2013-03-21
Information query
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