Invention Grant
- Patent Title: Anti-transient showerhead
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Application No.: US15163594Application Date: 2016-05-24
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Publication No.: US10023959B2Publication Date: 2018-07-17
- Inventor: Edward Sung , Colin F. Smith , Shawn M. Hamilton
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C23C16/455
- IPC: C23C16/455
Abstract:
Showerheads for semiconductor processing equipment are disclosed that include various features designed to minimize or eliminate non-uniform gas delivery across the surface of a wafer due to gas flow transients within the showerhead.
Public/Granted literature
- US20160348242A1 ANTI-TRANSIENT SHOWERHEAD Public/Granted day:2016-12-01
Information query
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