Invention Grant
- Patent Title: Periodic table group 13 metal nitride crystals and method for manufacturing periodic table group 13 metal nitride crystals
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Application No.: US15800128Application Date: 2017-11-01
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Publication No.: US10023976B2Publication Date: 2018-07-17
- Inventor: Yuuki Enatsu , Satoru Nagao , Shuichi Kubo , Hirotaka Ikeda , Kenji Fujito
- Applicant: Mitsubishi Chemical Corporation
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee: MITSUBISHI CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-081735 20120330; JP2012-082153 20120330
- Main IPC: C30B29/40
- IPC: C30B29/40 ; H01L21/02 ; H01L29/20 ; C30B25/20 ; C30B25/14 ; C30B25/02

Abstract:
A periodic table Group 13 metal nitride crystals grown with a non-polar or semi-polar principal surface have numerous stacking faults. The purpose of the present invention is to provide a period table Group 13 metal nitride crystal wherein the occurrence of stacking faults of this kind are suppressed. The present invention achieves the foregoing by a periodic table Group 13 metal nitride crystal being characterized in that, in a Qx direction intensity profile that includes a maximum intensity and is derived from an isointensity contour plot obtained by x-ray reciprocal lattice mapping of (100) plane of the periodic table Group 13 metal nitride crystal, a Qx width at 1/300th of peak intensity is 6×10−4 rlu or less.
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