Invention Grant
- Patent Title: Turbomolecular pump, and method of manufacturing rotor
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Application No.: US13390630Application Date: 2009-08-26
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Publication No.: US10024327B2Publication Date: 2018-07-17
- Inventor: Shingo Tsutsui
- Applicant: Shingo Tsutsui
- Applicant Address: JP Kyoto-shi
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- International Application: PCT/JP2009/064838 WO 20090826
- International Announcement: WO2011/024261 WO 20110303
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/32 ; F04D29/52 ; F04D29/38

Abstract:
A turbomolecular pump includes: a rotor (4) on which rotary vanes (19) in multiple stages are formed; fixed vanes (21) in multiple stages; and a pump casing (7) in which a pump inlet opening (7a) is defined, and that houses the rotor (4) and the fixed vanes (21) in multiple stages; wherein: a surface of the rotor (4) facing the inlet opening has a first emissivity; a surface of one vane stage that is visible from the inlet opening, among a plurality of vane stages including the rotary vanes (19) and the fixed vanes (21), has the first emissivity; and a surface of one vane stage, among the plurality of vane stages, that is not visible from the inlet opening has a second emissivity that is greater than the first emissivity.
Public/Granted literature
- US20120207592A1 TURBOMOLECULAR PUMP, AND METHOD OF MANUFACTURING ROTOR Public/Granted day:2012-08-16
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