Invention Grant
- Patent Title: Micromechanical coriolis rate of rotation sensor
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Application No.: US15048020Application Date: 2016-02-19
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Publication No.: US10024663B2Publication Date: 2018-07-17
- Inventor: Alessandro Rocchi , Eleonora Marchetti , Lorenzo Bertini
- Applicant: Maxim Integrated Products, Inc.
- Applicant Address: US OH Canton
- Assignee: Hanking Electronics, Ltd.
- Current Assignee: Hanking Electronics, Ltd.
- Current Assignee Address: US OH Canton
- Agency: Hartman Global IP Law
- Agent Gary M. Hartman; Domenica N. S. Hartman
- Priority: DE102011056971 20111223
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/04 ; G01C19/5712 ; G01C19/5747

Abstract:
A micromechanical sensor that can detect shock effects in order to prevent false measurements. The sensor includes a substrate having a measurement axis and a detection axis that are disposed orthogonally to each other, and first and second driving masses disposed in a plane containing the measurement and detection axes. Each of the driving masses is rotatably coupled to the substrate via a central suspension disposed on the detection axis. The sensor includes drive electrodes that generate rotary motions in each of the driving masses about a drive axis thereof. At least one elastic connecting element allows the driving masses to deflect in opposite directions in response to a rate of rotation about the measurement axis but deflect in the same direction in response to a shock condition.
Public/Granted literature
- US20160169676A1 MICROMECHANICAL CORIOLIS RATE OF ROTATION SENSOR Public/Granted day:2016-06-16
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