Invention Grant
- Patent Title: Measurement object, method for the production thereof and device for the thermal treatment of substrates
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Application No.: US14898175Application Date: 2014-06-13
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Publication No.: US10024719B2Publication Date: 2018-07-17
- Inventor: Dieter Zernickel , Steffen Mueller
- Applicant: CENTROTHERM PHOTOVOLTAICS AG
- Applicant Address: DE
- Assignee: CENTROTHERM PHOTOVOLTAICS AG
- Current Assignee: CENTROTHERM PHOTOVOLTAICS AG
- Current Assignee Address: DE
- Agency: Tarolli, Sundheim, Covell & Tummino LLP
- Priority: DE102013009925 20130613
- International Application: PCT/EP2014/062408 WO 20140613
- International Announcement: WO2014/198912 WO 20141218
- Main IPC: G01J5/00
- IPC: G01J5/00 ; G01K13/00 ; G01J5/08 ; G01J5/52 ; H01L21/67 ; H01L21/687 ; F28F13/18
Abstract:
A measuring object for use in a heating apparatus for the thermal treatment of substrates is described, wherein the measuring object is the substrate to be treated or an object which in use has a substantially known temperature relation to the substrate to be treated, wherein the measuring object comprises a surface having at least one surface area, which acts as a measuring surface for an optical temperature measurement. A predetermined structure in the form of a plurality of recessions is formed in the surface area, in order to influence the emissivity of the surface area.
Public/Granted literature
- US20160131532A1 MEASUREMENT OBJECT, METHOD FOR THE PRODUCTION THEREOF AND DEVICE FOR THE THERMAL TREATMENT OF SUBSTRATES Public/Granted day:2016-05-12
Information query
