Invention Grant
- Patent Title: Pressing force sensor
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Application No.: US14515881Application Date: 2014-10-16
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Publication No.: US10024739B2Publication Date: 2018-07-17
- Inventor: Hideki Kawamura , Masamichi Ando
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Priority: JP2012-093525 20120417
- Main IPC: H01L41/053
- IPC: H01L41/053 ; G01L1/16 ; H01L41/193 ; B82Y15/00 ; H01L41/113

Abstract:
A pressing force sensor that includes a flat membrane piezoelectric element and a support. The flat membrane piezoelectric element includes a piezoelectric sheet having a piezoelectric constant. A first electrode is formed on a first main surface of the piezoelectric sheet and a second electrode is formed on a second main surface thereof. Long directions of the first electrode and the second electrode and a uniaxial stretching direction of the piezoelectric sheet form an angle of 45°. An opening portion having an elliptical section is formed on the support. The flat membrane piezoelectric element abuts the opening portion of the support. The support and the flat membrane piezoelectric element are disposed such that the opening portion is included within an area of the second electrode.
Public/Granted literature
- US20150035411A1 Pressing Force Sensor Public/Granted day:2015-02-05
Information query
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