- Patent Title: Interferometric ellipsometry and method using conical refraction
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Application No.: US15113161Application Date: 2015-01-22
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Publication No.: US10024783B2Publication Date: 2018-07-17
- Inventor: Yoel Arieli , Yoel Cohen
- Applicant: ADOM, Advanced Optical Technologies Ltd
- Applicant Address: IL Lod
- Assignee: ADOM, Advanced Optical Technologies Ltd.
- Current Assignee: ADOM, Advanced Optical Technologies Ltd.
- Current Assignee Address: IL Lod
- Agency: Workman Nydegger
- International Application: PCT/IL2015/050077 WO 20150122
- International Announcement: WO2015/111053 WO 20150730
- Main IPC: G01N21/21
- IPC: G01N21/21 ; G01B9/02 ; G01N21/45

Abstract:
An apparatus and method for determining optical properties of an object (50) includes a light source (10) and an optical system for illuminating at least one point of the object with light from the light source, and collecting light reflected from the object. A biaxial birefringent crystal (30) intercepts a beam of light reflected from the object and propagates the beam along an optical axis of the crystal and transforms the beam of reflected light to a ring of light having a periphery, each point of which has a different polarization plane. A detector array (40) detects respective points along the periphery of the ring and a processing unit (45) is coupled to the detector and is responsive to signals thereby for determining optical properties of the object.
Public/Granted literature
- US20170023464A1 Interferometric Ellipsometry and Method using Conical Refraction Public/Granted day:2017-01-26
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