Invention Grant
- Patent Title: MEMS sensor
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Application No.: US15192192Application Date: 2016-06-24
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Publication No.: US10024881B2Publication Date: 2018-07-17
- Inventor: Ville-Pekka Rytkönen
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo-shi, Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-shi, Kyoto
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20155508 20150626
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P15/18 ; G01C9/06 ; G01P15/08

Abstract:
The present invention relates to A MEMS sensor with movable and fixed components for measuring linear acceleration. The MEMS sensor includes at least two mutually independent differential sensor elements disposed inside a common frame structure providing walls for hermetic sealing of the MEMS sensor. The mutually independent differential sensor elements are pairwise configured to perform double differential detection of linear acceleration. The MEMS sensor includes a common anchoring area to which the at least two differential sensor elements are anchored. The common anchoring area is located at the centroid of the pairwise configured differential sensor elements. A self-test capability of the MEMS sensor is also provided.
Public/Granted literature
- US20160377649A1 MEMS SENSOR Public/Granted day:2016-12-29
Information query
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