Invention Grant
- Patent Title: Testing method and unit for micro electro-mechanical systems
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Application No.: US15085221Application Date: 2016-03-30
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Publication No.: US10024901B2Publication Date: 2018-07-17
- Inventor: Marco Guolo , Carlo Ferrero
- Applicant: OSAI A.S. S.p.A.
- Applicant Address: IT Turin
- Assignee: OSAI A.S. S.P.A.
- Current Assignee: OSAI A.S. S.P.A.
- Current Assignee Address: IT Turin
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: EP15162009 20150331
- Main IPC: G01R31/36
- IPC: G01R31/36 ; G01R31/01 ; G01R31/28 ; B07C5/34 ; G01R31/26 ; H01L21/00 ; G05B1/00

Abstract:
A testing method for a micro electro-mechanical system is described, comprising the steps of: i) feeding a system to be tested on a first tray; ii) collecting the system from the first tray; and iii) verifying correct operation of the system collected from the first tray; the method further comprises step iv) of acquiring at least one parameter associated with the presence or otherwise of the system on the first tray; and/or with the fact that the system matches or otherwise a correct identification code; and/or with correct or incorrect orientation and/or position of the system on the first tray; step iv) being performed prior to step ii).
Public/Granted literature
- US20160291072A1 TESTING METHOD AND UNIT FOR MICRO ELECTRO-MECHANICAL SYSTEMS Public/Granted day:2016-10-06
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