Invention Grant
- Patent Title: Microscope and component for multi-beam scanning
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Application No.: US14645697Application Date: 2015-03-12
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Publication No.: US10025080B2Publication Date: 2018-07-17
- Inventor: Matthias Wald
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Haug Partners LLP
- Priority: DE102014003773 20140315
- Main IPC: G02B21/00
- IPC: G02B21/00

Abstract:
A laser-scanning microscope having an illumination-beam path and a detection-beam path and a microscope objective. A component for generating a plurality of scanning beams from at least one illumination beam is located in the illumination-beam path. A wedge-shaped, light-transmitting first component part provided in the illumination beam path generates spatially offset partial beams, the scanning beams being generated at the first component part by multiple reflections at an at least partially partially-reflecting surface. The microscope has a one-dimensional scanner for moving the scanning beams over a sample in the illumination beam path. The scanning beams have at least partially relative to one another a non-zero angle upstream of the objective in the illumination direction. The scanning beams can intersect at least partially in the objective pupil of the microscope objective. Additional compensation elements are provided for the scanning beams to compensate for a spectral dispersion and/or the beam direction.
Public/Granted literature
- US20170293126A1 Microscope and Component for Multi-beam Scanning Public/Granted day:2017-10-12
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