Invention Grant
- Patent Title: Radiation-sensitive resin composition and electronic device
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Application No.: US15124630Application Date: 2015-03-18
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Publication No.: US10025182B2Publication Date: 2018-07-17
- Inventor: Takashi Tsutsumi
- Applicant: ZEON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ZEON CORPORATION
- Current Assignee: ZEON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2014-058522 20140320
- International Application: PCT/JP2015/058036 WO 20150318
- International Announcement: WO2015/141717 WO 20150924
- Main IPC: G03F7/023
- IPC: G03F7/023 ; C08G59/20 ; C08G59/62 ; G03F7/022 ; G03F7/038 ; G03F7/075

Abstract:
A radiation-sensitive resin composition comprising a binder resin (A), a radiation-sensitive compound (B), a tetrafunctional or lower functional epoxy-based cross-linking agent (C) having an epoxy equivalent of 450 or less and a softening point of 30° C. or less, and an aralkyl phenol resin (D) is provided. According to the present invention, it is possible to provide a radiation-sensitive resin composition able to give a resin film high in adhesion to a metal layer and excellent in developability and low hygroscopicity.
Public/Granted literature
- US20170023859A1 RADIATION-SENSITIVE RESIN COMPOSITION AND ELECTRONIC DEVICE Public/Granted day:2017-01-26
Information query
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