Invention Grant
- Patent Title: Polymer-containing coating liquid applied to resist pattern
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Application No.: US15121242Application Date: 2015-02-03
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Publication No.: US10025191B2Publication Date: 2018-07-17
- Inventor: Shuhei Shigaki , Yasushi Sakaida , Rikimaru Sakamoto
- Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-035855 20140226
- International Application: PCT/JP2015/052970 WO 20150203
- International Announcement: WO2015/129405 WO 20150903
- Main IPC: G03F7/075
- IPC: G03F7/075 ; G03F7/40 ; G03F7/11 ; C08L83/04 ; C09D183/04 ; G03F7/32 ; G03F7/16 ; G03F7/20 ; G03F7/38 ; H01L21/308

Abstract:
There is provided a polymer-containing coating liquid which is applied to a resist pattern and which is used in place of a conventional rinsing liquid. A coating liquid that is applied to a resist pattern comprising a polymer having a structural unit of Formula (1): (wherein R1 is a C1-12 organic group, and X is an organic group of Formula (2): (wherein R2 and R3 are each independently a linear or branched alkylene group having a carbon atom number of 1 to 3, R2 is bonded to an oxygen atom in Formula (1), R4 is a C1-4 alkoxy group, an allyloxy group, or a hydroxy group, and p is 0, 1, or 2)), and a solvent containing water and/or alcohols.
Public/Granted literature
- US20160363867A1 POLYMER-CONTAINING COATING LIQUID APPLIED TO RESIST PATTERN Public/Granted day:2016-12-15
Information query
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