Invention Grant
- Patent Title: Horizontal nanosheet FETs and method of manufacturing the same
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Application No.: US15343157Application Date: 2016-11-03
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Publication No.: US10026652B2Publication Date: 2018-07-17
- Inventor: Wei-E Wang , Mark S. Rodder , Borna J. Obradovic , Joon Goo Hong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L27/088 ; H01L29/06 ; H01L29/423 ; H01L29/49 ; H01L29/786 ; H01L29/66 ; H01L21/02 ; H01L21/28

Abstract:
Multi-Vt horizontal nanosheet devices and a method of making the same. In one embodiment, an integrated circuit includes a plurality of horizontal nanosheet devices (hNS devices) on a top surface of a substrate, the plurality of hNS devices including a first hNS device and a second hNS device spaced apart from each other horizontally. Each of the hNS devices includes a first and a second horizontal nanosheets spaced apart vertically; and a gate stack between the first and second horizontal nanosheets, the gate stack including a work function metal (WFM) layer. A thickness of the first and second horizontal nanosheets of the first hNS device is different from a thickness of the first and second horizontal nanosheets of the second hNS device, and a thickness of the WFM layer of the first hNS device is different from a thickness of the WFM layer of the second hNS device.
Public/Granted literature
- US20180053690A1 HORIZONTAL NANOSHEET FETS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-02-22
Information query
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