Invention Grant
- Patent Title: Methods of forming fin isolation regions under tensile-strained fins on FinFET semiconductor devices
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Application No.: US14608815Application Date: 2015-01-29
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Publication No.: US10026659B2Publication Date: 2018-07-17
- Inventor: Ajey Poovannummoottil Jacob , Murat Kerem Akarvardar , Jody A. Fronheiser
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84 ; H01L29/165 ; H01L21/762 ; H01L21/8238 ; H01L21/02

Abstract:
One illustrative method disclosed herein includes, among other things, forming a composite fin structure that is comprised of a first germanium-containing semiconductor material having a first concentration of germanium and a tensile-strained second semiconductor material (having a lesser germanium concentration) positioned on the first germanium-containing semiconductor material and performing a thermal anneal process to convert the first germanium-containing semiconductor material portion of the composite fin structure into a germanium-containing oxide isolation region positioned under the second semiconductor material that is a tensile-strained final fin for an NMOS FinFET device.
Public/Granted literature
- US20160225676A1 METHODS OF FORMING FIN ISOLATION REGIONS UNDER TENSILE-STRAINED FINS ON FINFET SEMICONDUCTOR DEVICES Public/Granted day:2016-08-04
Information query
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