Invention Grant
- Patent Title: Adding cap to copper passivation flow for electroless plating
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Application No.: US13295379Application Date: 2011-11-14
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Publication No.: US10026706B2Publication Date: 2018-07-17
- Inventor: Pragnesh R. Vaghela
- Applicant: Pragnesh R. Vaghela
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L23/00

Abstract:
An integrated circuit includes a metal seed layer contacting a metal element of a top interconnect layer, a plated copper pad over the seed layer, a plated metal cap layer on the top surface of the copper pad, an upper protective overcoat covering a lateral surface of the copper pad and overlapping a top surface of the cap layer with a bond pad opening exposing the cap layer, and a bond pad of electroless plated metal in the bond pad opening.
Public/Granted literature
- US20120119364A1 ADDING CAP TO COPPER PASSIVATION FLOW FOR ELECTROLESS PLATING Public/Granted day:2012-05-17
Information query
IPC分类: