Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
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Application No.: US15353112Application Date: 2016-11-16
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Publication No.: US10026743B2Publication Date: 2018-07-17
- Inventor: Nobuhito Kuge , Tatsuya Fujishima , Masayuki Shishido , Akira Kuramoto , Hideto Onuma
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/11556 ; H01L27/11521

Abstract:
A semiconductor memory device includes a stacked body including a plurality of word lines; a semiconductor layer extending through the word lines; a memory cell provided at a part where the semiconductor layer crosses one of the word lines, the memory cell including a plurality of cell layers, the cell layers including a first insulating layer; and at least one of a first structural body and a second structural body provided around the stacked body. The first structural body includes a plurality of monitor layers including same materials respectively as materials of the cell layers. The second structural body includes a first electrode, a second electrode and an insulating body positioned between the first electrode and the second electrode. The insulating body includes same material as a material of the first insulating layer, and has almost the same thickness as a thickness of the first insulating layer.
Public/Granted literature
- US20180047741A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2018-02-15
Information query
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