- Patent Title: Non-volatile memory device with first gate structure in memory cell region and second gate structure in peripheral circuit region and non-volatile memory system including the same
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Application No.: US15239121Application Date: 2016-08-17
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Publication No.: US10026747B2Publication Date: 2018-07-17
- Inventor: Chul-Jin Hwang , Pan-Suk Kwak , Seok-Jun Ham
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Go
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Go
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2015-0116853 20150819
- Main IPC: G11C29/24
- IPC: G11C29/24 ; G11C29/02 ; H01L27/11582 ; G11C16/04 ; G11C5/02 ; H01L49/02

Abstract:
A non-volatile memory device is provided as follows. A substrate has a peripheral circuit. A first semiconductor layer is disposed on the substrate. The first semiconductor layer includes a memory cell region. A first gate structure is disposed on the first semiconductor layer. The first gate structure includes a plurality of first gate electrodes stacked in a perpendicular direction to the first semiconductor layer and a plurality of vertical channel structures penetrating the plurality of first gate electrodes. The first gate structure is arranged in the memory cell region. A second gate structure is disposed on the substrate. The second gate structure includes a plurality of second gate electrodes stacked in the perpendicular direction to the first semiconductor layer. The second gate structure is arranged outside the memory cell region.
Public/Granted literature
- US20170053923A1 NON-VOLATILE MEMORY DEVICE AND NON-VOLATILE MEMORY SYSTEM INCLUDING THE SAME Public/Granted day:2017-02-23
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