Invention Grant
- Patent Title: Substrate processing apparatus and substrate processing method
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Application No.: US14777694Application Date: 2014-03-17
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Publication No.: US10026760B2Publication Date: 2018-07-17
- Inventor: Koichi Hamada , Nobuo Kobayashi
- Applicant: SHIBAURA MECHATRONICS CORPORATION
- Applicant Address: JP Yokohama-shi
- Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee: SHIBAURA MECHATRONICS CORPORATION
- Current Assignee Address: JP Yokohama-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-073380 20130329; JP2014-048638 20140312
- International Application: PCT/JP2014/057088 WO 20140317
- International Announcement: WO2014/156754 WO 20141002
- Main IPC: B08B3/04
- IPC: B08B3/04 ; H01L27/12 ; H01L21/67 ; B08B3/02 ; B08B3/08 ; B08B3/10 ; H01L21/02 ; H01L21/687 ; B08B3/00

Abstract:
According to one embodiment, a substrate processing apparatus (1) includes: a support (4) configured to support a substrate (W); a rotation mechanism (5) configured to rotate the support (4) about an axis that crosses the substrate (W) supported by the support (4) as a rotation axis; a nozzle (6) configured to supply a treatment liquid to a surface of the substrate (W) on the support (4) being rotated by the rotation mechanism (5); a heater (8) configured to heat the substrate (W) supported by the support (4) at a distance from the substrate (W); and a movement mechanism (9) configured to move the heater (8) in directions toward and away from the substrate (W) supported by the support (4).
Public/Granted literature
- US20160276379A1 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Public/Granted day:2016-09-22
Information query
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