Invention Grant
- Patent Title: Detector, detector with lock-in amplifier, substrate, and method for manufacturing a detector
-
Application No.: US15270367Application Date: 2016-09-20
-
Publication No.: US10026768B2Publication Date: 2018-07-17
- Inventor: Osamu Saruwatari , Shigeru Aoki , Kazuya Okamoto , Isao Sugaya , Masashi Okada , Hiroshi Ohki
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-074063 20140331
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L25/065 ; H01L25/07 ; H01L25/18 ; H01L31/10 ; H04N5/3745 ; H01L25/00 ; G01S17/89 ; G01S7/486 ; G01S7/487 ; G01S7/491 ; G01S7/493

Abstract:
A detector comprises a plurality of photoelectric converters to output an electrical signal corresponding to an incident light, and a plurality of filter circuits provided corresponding to each of the plurality of photoelectric converters or to each of a plurality of element groups respectively including a predetermined number of the photoelectric converters of the plurality of photoelectric converters, the plurality of filter circuits attenuating a signal having a predetermined frequency from the electrical signal output from the plurality of photoelectric converters,In the above-described detector, the plurality of photoelectric converters may be provided in a first substrate, and the plurality of filter circuits may be provided in a second substrate laminated on the first substrate.
Public/Granted literature
- US20170069677A1 DETECTOR, DETECTOR WITH LOCK-IN AMPLIFIER, SUBSTRATE, AND METHOD FOR MANUFACTURING A DETECTOR Public/Granted day:2017-03-09
Information query
IPC分类: