Invention Grant
- Patent Title: Memory device
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Application No.: US15497810Application Date: 2017-04-26
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Publication No.: US10026781B2Publication Date: 2018-07-17
- Inventor: Kenichi Murooka
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/528 ; H01L27/24 ; H01L45/00

Abstract:
According to one embodiment, a memory device includes a first interconnect group, a second interconnect group, and a memory cell. In the first interconnect group, first interconnects are stacked. The first interconnect group includes first regions in which the first interconnects are formed along a first direction, and a second region in which first contact plugs are formed on the first interconnects. In the second region, the first interconnect group includes a step portion. Heights of adjacent terraces of the step portion are different from each other by the two or more first interconnects.
Public/Granted literature
- US20170229514A1 MEMORY DEVICE Public/Granted day:2017-08-10
Information query
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