Invention Grant
- Patent Title: Field boosted metal-oxide-semiconductor field effect transistor
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Application No.: US12824075Application Date: 2010-06-25
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Publication No.: US10026835B2Publication Date: 2018-07-17
- Inventor: Naveen Tipirneni , Deva Pattanayak
- Applicant: Naveen Tipirneni , Deva Pattanayak
- Applicant Address: US CA San Jose
- Assignee: Vishay-Siliconix
- Current Assignee: Vishay-Siliconix
- Current Assignee Address: US CA San Jose
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/78 ; H01L29/423 ; H01L29/66 ; H01L29/08

Abstract:
A trench metal-oxide-semiconductor field effect transistor (TMOSFET) includes a plurality of mesas disposed between a plurality of gate regions. Each mesa includes a drift region and a body region. The width of the mesa is in the order of quantum well dimension at the interface between the gate insulator regions and the body regions The TMOSFET also includes a plurality of gate insulator regions disposed between the gate regions and the body regions, drift regions, and drain region. The thickness of the gate insulator regions between the gate regions and the drain region results in a gate-to-drain electric field in an OFF-state that is substantially lateral aiding to deplete the charge in the drift regions.
Public/Granted literature
- US20110095359A1 Field Boosted Metal-Oxide-Semiconductor Field Effect Transistor Public/Granted day:2011-04-28
Information query
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