Invention Grant
- Patent Title: Method for producing a memory device having a phase change film and reset gate
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Application No.: US15647509Application Date: 2017-07-12
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Publication No.: US10026893B2Publication Date: 2018-07-17
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L45/00
- IPC: H01L45/00 ; G11C13/00 ; H01L27/24 ; H01L23/528

Abstract:
A method for producing a memory device includes depositing a second interlayer insulating film on a substrate, forming contact holes, and depositing a second metal and a nitride film. The second metal and the nitride film are removed to form pillar-shaped nitride layers, and to form lower electrodes surrounding the pillar-shaped nitride layers. The second interlayer insulating film is etched back to expose upper portions of the lower electrodes. The upper portions of the lower electrodes surrounding the pillar-shaped nitride film are removed and a phase change film is deposited to surround the pillar-shaped nitride film and connect with the lower electrodes. The phase change film is etched on upper portions of the pillar-shaped nitride film, and a reset gate insulating film is formed surrounding the phase change film and forming a reset gate having a side wall shape and remaining on the upper portions of the pillar-shaped nitride film.
Public/Granted literature
- US20170309814A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE Public/Granted day:2017-10-26
Information query
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