Invention Grant
- Patent Title: Method for obtaining a bonding surface for direct bonding
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Application No.: US14764072Application Date: 2014-02-12
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Publication No.: US10032742B2Publication Date: 2018-07-24
- Inventor: Lamine Benaissa , Paul Gondcharton , Bruno Imbert
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oliff PLC
- Priority: FR13/51799 20130228
- International Application: PCT/FR2014/050269 WO 20140212
- International Announcement: WO2014/131960 WO 20140904
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/18 ; H01L33/00

Abstract:
A process for obtaining a bonding surface for direct bonding includes: a) providing a substrate based on a sintered metal having a base surface with an RMS roughness lower than 6 nanometers and a PV roughness lower than 100 nanometers; b) bombarding the base surface with ionic species; c) depositing a metal layer on the base surface; and d) carrying out a mechanical and/or chemical polish of an exposed surface of the metal layer. A structure including a substrate based on a sintered metal the base surface of which is at least partially formed from a metal including ionic species implanted by bombardment of the base surface, and a metal layer of identical chemical composition to that of the metal base substrate and including a bonding surface with an RMS roughness lower than 0.6 nanometers and a PV roughness lower than 10 nanometers is also provided.
Public/Granted literature
- US20150364442A1 METHOD FOR OBTAINING A BONDING SURFACE FOR DIRECT BONDING Public/Granted day:2015-12-17
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