Invention Grant
- Patent Title: Method for forming ohmic contacts
-
Application No.: US15289519Application Date: 2016-10-10
-
Publication No.: US10032880B2Publication Date: 2018-07-24
- Inventor: Aurore Constant , Peter Coppens
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: IPTechLaw
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L29/45 ; H01L29/205 ; H01L29/20 ; H01L23/31 ; H01L21/285 ; H01L29/778

Abstract:
Implementations of an ohmic contact for a gallium nitride (GaN) device may include: a first layer including aluminum coupled directly with the GaN device; the GaN having a heterostructure with an undoped GaN channel and a semi-insulating aluminum gallium nitride (AlGaN) barrier, all the foregoing operatively coupled with a substrate; a second layer including titanium coupled over the first layer; and a third layer including an anti-diffusion material coupled with the second layer. The passivation layer may be coupled between the AlGaN barrier and the first layer of the ohmic contact. The passivation layer may surround the ohmic contact.
Public/Granted literature
- US20180102416A1 METHOD FOR FORMING OHMIC CONTACTS Public/Granted day:2018-04-12
Information query
IPC分类: