- Patent Title: Semiconductor optical element, semiconductor laser element, and method for manufacturing semiconductor optical element and semiconductor laser element, and method for manufacturing semiconductor laser module and semiconductor element
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Application No.: US14622363Application Date: 2015-02-13
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Publication No.: US10033154B2Publication Date: 2018-07-24
- Inventor: Kouhei Kinugawa , Hidehiro Taniguchi , Masafumi Tajima , Hirotatsu Ishii , Takeshi Namegaya
- Applicant: Furukawa Electric Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Furukawa Electronic Co., Ltd.
- Current Assignee: Furukawa Electronic Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01S5/16 ; H01S5/20 ; H01S5/30 ; H01S5/22 ; H01S5/32 ; H01S5/343 ; H01L21/02

Abstract:
A semiconductor optical element includes a semiconductor layer portion that includes an optical waveguide layer. The semiconductor layer portion contains a first impurity having a function of suppressing atomic vacancy diffusion and a second impurity having a function of promoting atomic vacancy diffusion, between a topmost surface of the semiconductor layer portion and the optical waveguide layer. The semiconductor layer portion includes two or more regions that extend in a deposition direction. At least one of the two or more regions contains both the first impurity and the second impurity. The two or more regions have different degrees of disordering in the optical waveguide layer achieved through atomic vacancy diffusion and different band gap energies of the optical waveguide layer.
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