Invention Grant
- Patent Title: Bulk acoustic wave accelerometers
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Application No.: US15062364Application Date: 2016-03-07
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Publication No.: US10036764B2Publication Date: 2018-07-31
- Inventor: Farrokh Ayazi
- Applicant: Georgia Tech Research Corporation
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Burns & Levinson LLP
- Agent Bruce D. Jobse
- Main IPC: G01P15/097
- IPC: G01P15/097

Abstract:
Accelerometers and associated techniques for detecting motion are described. For a resonant accelerometer, an externally-applied acceleration can cause a change in the electrical spring constant Ke of the electromechanical system. A resonant accelerometer can be driven to resonate in a bulk acoustic wave mode of vibration, which can have a high resonant frequency. Other accelerometers and associated techniques are disclosed.
Public/Granted literature
- US20160258976A1 BULK ACOUSTIC WAVE ACCELEROMETERS Public/Granted day:2016-09-08
Information query
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