Invention Grant
- Patent Title: Semiconductor device and method for manufacturing same
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Application No.: US15867681Application Date: 2018-01-10
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Publication No.: US10038102B2Publication Date: 2018-07-31
- Inventor: Tatsuyoshi Mihara
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Tokyo
- Agency: Shapiro, Gabor and Rosenberger, PLLC
- Priority: JP2016-032688 20160224
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L21/28

Abstract:
A semiconductor device includes a semiconductor substrate including a main surface, an element separation film formed over the main surface, and a fin protruding from the element separation film and extending in the first direction in plan view. The semiconductor device further includes a control gate electrode extending in the second direction that is orthogonal to the first direction along the surface of the fin through a gate insulating film and overlaps with a first main surface of the element separation film, and a memory gate electrode extending in the second direction along the surface of the fin through an insulating film and overlaps with a second main surface of the element separation film, in which the second main surface is lower than the first main surface relative to the main surface.
Public/Granted literature
- US20180138318A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2018-05-17
Information query
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