Invention Grant
- Patent Title: MRAM device and method for fabricating the same
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Application No.: US15281428Application Date: 2016-09-30
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Publication No.: US10038137B2Publication Date: 2018-07-31
- Inventor: Harry-Hak-Lay Chuang , Sheng-Haung Huang , Hung-Cho Wang , Kuei-Hung Shen , Shy-Jay Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/12 ; H01L43/08 ; H01L43/02

Abstract:
A semiconductor device structure is provided. The semiconductor device structure includes a magnetoresistive random access memory (MRAM) device in an insulating layer. The MRAM device includes a first electrode, a magnetic tunnel junction (MTJ) over the first electrode, a second electrode over the MTJ, and an insulating spacer surrounding sidewalls of the first electrode, the MTJ, and the second electrode. Top surfaces of the insulating spacer and the second electrode are exposed from the insulating layer. The semiconductor device structure also includes a conductive pad over the insulating layer and electrically connected to the second electrode. The MTJ is entirely covered by the conductive pad.
Public/Granted literature
- US20180097175A1 MRAM DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2018-04-05
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