Invention Grant
- Patent Title: Fan scrubber and vacuum pump apparatus
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Application No.: US15201923Application Date: 2016-07-05
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Publication No.: US10040026B2Publication Date: 2018-08-07
- Inventor: Hiroki Furuta , Tetsuro Sugiura , Tetsuo Komai , Atsushi Oyama , Takashi Kyotani , Shinichi Sekiguchi , Takanori Inada
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2015-135140 20150706
- Main IPC: B01D53/78
- IPC: B01D53/78 ; B01D47/06 ; B01D53/38 ; H02K5/128 ; H02K5/167 ; H02K1/32 ; H02K7/14

Abstract:
The fan scrubber is provided with a casing having a gas draw-in port and a gas ejection port, a fan disposed in the casing, a nozzle from which a liquid is jetted into the casing, and a canned motor connected to the fan. The canned motor has a main shaft connected to the fan, a rotor which rotates integrally with the main shaft, a stator disposed on the periphery of the rotor, a motor casing in which the rotor and the stator are housed, and a can which partitions the interior of the motor casing into a rotor chamber in which the rotor is disposed and a stator chamber in which the stator is disposed.
Public/Granted literature
- US20170007961A1 FAN SCRUBBER AND VACUUM PUMP APPARATUS Public/Granted day:2017-01-12
Information query
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