Invention Grant
- Patent Title: Stepped retaining ring
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Application No.: US15632684Application Date: 2017-06-26
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Publication No.: US10040168B2Publication Date: 2018-08-07
- Inventor: Shaun Van Der Veen , Steven M. Zuniga
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/32
- IPC: B24B37/32
Abstract:
A two part retaining ring is described. A rigid upper portion has an annular recess along its inner diameter. An annular wearable lower portion has an inner diameter, an annular extension defined by the inner diameter and a vertical wall that is perpendicular to a surface of the second portion and opposite to the inner diameter. The annular extension fits into the annular recess of the annular first portion. A bonding material is on the vertical wall of the annular second portion.
Public/Granted literature
- US20170312882A1 Stepped Retaining Ring Public/Granted day:2017-11-02
Information query
