Invention Grant
- Patent Title: Gas injection apparatus and thin film deposition equipment including the same
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Application No.: US14835082Application Date: 2015-08-25
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Publication No.: US10041172B2Publication Date: 2018-08-07
- Inventor: Ki-Chul Kim , Jung-Il Ahn , Jung-Hun Seo , Jong-Cheol Lee , Kyu-Hee Han , Seung-Han Lee , Jin-Pil Heo
- Applicant: Ki-Chul Kim , Jung-Il Ahn , Jung-Hun Seo , Jong-Cheol Lee , Kyu-Hee Han , Seung-Han Lee , Jin-Pil Heo
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2014-0115502 20140901
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/455

Abstract:
A gas injection apparatus, which can sequentially supply a substrate with at least two kinds of source gases reacting with each other in a container, and thin film deposition equipment including the gas injection apparatus, are provided. The gas injection apparatus includes a base plate, a first gas supply region protruding from the base plate, a second gas supply region protruding from the base plate and adjacent the first gas supply region, and a trench defined by a sidewall of the first gas supply region and a sidewall of the second gas supply region. The sidewall of the first gas supply region and the sidewall of the second gas supply region face each other and extend in a radial direction on the base plate.
Public/Granted literature
- US20160060759A1 GAS INJECTION APPARATUS AND THIN FILM DEPOSITION EQUIPMENT INCLUDING THE SAME Public/Granted day:2016-03-03
Information query
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