A technology is provided that makes it possible for even a beginner to determine whether a measurement result is correct, to thereby prevent the use of incorrect measurement data, and to improve the reliability of an analysis result. In a three-dimensional shape measurement apparatus 100 that measures a three-dimensional shape of a specimen 3 in a non-contacting manner, a score that evaluates the reliability of measurement data is calculated for each measurement point by use of information obtained during a process of estimating the height of the specimen 3 or the estimated height. Measurement data is processed according to a result of evaluating the measurement data for each measurement point by use of the score.