Invention Grant
- Patent Title: 3D micro and nanoheater design for ultra-low power gas sensors
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Application No.: US14955486Application Date: 2015-12-01
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Publication No.: US10041898B2Publication Date: 2018-08-07
- Inventor: Josephine B. Chang , Hendrik F. Hamann , Siyuan Lu , Xiaoyan Shao
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: G01N27/12
- IPC: G01N27/12 ; H05B3/12 ; G01R3/00 ; G01N33/00

Abstract:
High-efficiency, ultra-low power gas sensors are provided. In one aspect, a gas detector device is provided which includes: at least one gas sensor having a plurality of fins; a conformal resistive heating element on the fins; a conformal barrier layer on the resistive heating element; and a conformal sensing layer on the barrier layer. A method of forming a gas sensor as well as a method for use thereof in gas detection are also provided.
Public/Granted literature
- US20170153198A1 3D Micro and Nanoheater Design for Ultra-Low Power Gas Sensors Public/Granted day:2017-06-01
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