Invention Grant
- Patent Title: Gimbal assembly test system and method
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Application No.: US15014479Application Date: 2016-02-03
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Publication No.: US10041976B2Publication Date: 2018-08-07
- Inventor: David L. Gardell , David M. Audette , Peter W. Neff
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Michael LeStrange
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R33/00 ; G01R35/00 ; G01R31/24 ; G01R31/44 ; G01R31/26

Abstract:
Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.
Public/Granted literature
- US20170219626A1 GIMBAL ASSEMBLY TEST SYSTEM AND METHOD Public/Granted day:2017-08-03
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