Invention Grant
- Patent Title: Three-dimensional surface potential distribution measurement apparatus
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Application No.: US15314678Application Date: 2014-06-06
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Publication No.: US10041980B2Publication Date: 2018-08-07
- Inventor: Masaaki Furukawa , Kodai Ushiwata , Tetsuo Yoshimitsu , Yuichi Tsuboi , Kunihiko Hidaka , Akiko Kumada , Hisatoshi Ikeda
- Applicant: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION , THE UNIVERSITY OF TOKYO
- Applicant Address: JP Chuo-ku JP Bunkyo-ku
- Assignee: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION,THE UNIVERSITY OF TOKYO
- Current Assignee: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION,THE UNIVERSITY OF TOKYO
- Current Assignee Address: JP Chuo-ku JP Bunkyo-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- International Application: PCT/JP2014/003053 WO 20140606
- International Announcement: WO2015/186160 WO 20151210
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R15/18 ; G01R15/24 ; G01R19/00 ; G01R29/14

Abstract:
A three-dimensional surface potential distribution measurement apparatus includes: a laser light source; a Pockels crystal; a mirror; a light detector; a support structure which supports the aforementioned elements while maintaining a relative positional relationship therebetween; a movement driver which can move the support structure three-dimensionally; a rotary driver which supports the test object and can rotate the test object about an axis extending in a longitudinal direction of the test object; and a drive controller which controls the movement driver and the rotary driver. The drive controller coordinates a driving operation by the movement driver and by the rotary driver while maintaining a gap between the second end face of the Pockels crystal and a surface of the test object at a predetermined value such that the second end face of the Pockels crystal approaches all the surfaces of the electric field reduction system on the test object.
Public/Granted literature
- US20170160314A1 THREE-DIMENSIONAL SURFACE POTENTIAL DISTRIBUTION MEASUREMENT APPARATUS Public/Granted day:2017-06-08
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