Three-dimensional surface potential distribution measurement apparatus
Abstract:
A three-dimensional surface potential distribution measurement apparatus includes: a laser light source; a Pockels crystal; a mirror; a light detector; a support structure which supports the aforementioned elements while maintaining a relative positional relationship therebetween; a movement driver which can move the support structure three-dimensionally; a rotary driver which supports the test object and can rotate the test object about an axis extending in a longitudinal direction of the test object; and a drive controller which controls the movement driver and the rotary driver. The drive controller coordinates a driving operation by the movement driver and by the rotary driver while maintaining a gap between the second end face of the Pockels crystal and a surface of the test object at a predetermined value such that the second end face of the Pockels crystal approaches all the surfaces of the electric field reduction system on the test object.
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