Invention Grant
- Patent Title: Imprint apparatus, imprinting mold, and method of manufacturing article
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Application No.: US14533992Application Date: 2014-11-05
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Publication No.: US10042250B2Publication Date: 2018-08-07
- Inventor: Yusuke Tanaka , Hirotoshi Torii
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2013-231575 20131107
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
An imprint apparatus for forming a pattern on a substrate by contacting an imprint material on the substrate with a mold includes a mold holding member configured to hold the mold and a mold deforming mechanism for applying a force to a side surface of the mold in a direction along a pattern face of the mold in which the pattern is formed in order to deform the pattern formed in the mold held by the mold holding member. The mold deforming mechanism includes a contact portion to contact with the side surface of the mold to press against the side surface. The contact portion is shaped such that a dimension of part of the contact portion to contact with the side surface of the mold is less than a dimension of part of the contact portion away from the side surface of the mold.
Public/Granted literature
- US20150123313A1 IMPRINT APPARATUS, IMPRINTING MOLD, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2015-05-07
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