Invention Grant
- Patent Title: Negative developing method and negative developing apparatus
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Application No.: US15071601Application Date: 2016-03-16
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Publication No.: US10042262B2Publication Date: 2018-08-07
- Inventor: Tadashi Miyagi , Koji Kaneyama
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2015-059547 20150323
- Main IPC: G03C5/26
- IPC: G03C5/26 ; G03F7/32 ; G03F7/40 ; G03F7/30

Abstract:
Disclosed is a negative developing method including a puddle-forming step, a diluting step, and a surface drying step. In the puddle-forming step, developer containing an organic solvent is supplied to a resist film formed on a surface of the substrate and keeping a puddle of the developer on the resist film. In the diluting step, a concentration of a dissolution product dissolved in the developer on the resist film is diluted by additionally supplying the developer containing the organic solvent to the resist film after the puddle-forming step. In the surface drying step, the surface of the substrate is dried by rotating the substrate after the diluting step.
Public/Granted literature
- US20160282722A1 NEGATIVE DEVELOPING METHOD AND NEGATIVE DEVELOPING APPARATUS Public/Granted day:2016-09-29
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