- Patent Title: Process tools and methods of forming devices using process tools
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Application No.: US14636238Application Date: 2015-03-03
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Publication No.: US10043640B2Publication Date: 2018-08-07
- Inventor: Manfred Engelhardt
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/306 ; H01J37/32 ; H01L21/3065 ; C23C16/513
Abstract:
In accordance with an embodiment of the present invention, a process tool includes a chuck configured to hold a substrate. The chuck is disposed in a chamber. The process tool further includes a shielding unit with a central opening. The shielding unit is disposed in the chamber over the chuck.
Public/Granted literature
- US20150179413A1 Process Tools and Methods of Forming Devices Using Process Tools Public/Granted day:2015-06-25
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