Invention Grant
- Patent Title: End block assembly, bearing assembly, and method for manufacturing a bearing assembly
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Application No.: US15150483Application Date: 2016-05-10
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Publication No.: US10043643B2Publication Date: 2018-08-07
- Inventor: Sebastian Siegert , Gerit Stude , Gerd Arnold
- Applicant: VON ARDENNE GmbH
- Applicant Address: DE Dresden
- Assignee: VON ARDENNE Asset GmbH & Co. KG
- Current Assignee: VON ARDENNE Asset GmbH & Co. KG
- Current Assignee Address: DE Dresden
- Agency: Viering, Jentschura & Partner MBB
- Priority: DE102015107809 20150519
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; F16C19/24 ; H01J25/50

Abstract:
In various embodiments, an end block assembly for rotatably mounting a tubular electrode in a processing chamber is provided. The end block assembly includes a receptacle region for receiving a bearing assembly which has a coupling region for coupling the tubular electrode thereto, the bearing assembly of which the coupling region is supported by a sleeve of the bearing assembly. The sleeve is plug-fitted into the receptacle region. The sleeve is joined together from a plurality of segments, the external faces thereof forming a lateral surface of the bearing assembly and at least two segments thereof being formed from dissimilar materials. The external faces of the two segments are mutually aligned such that they are flush with one another.
Public/Granted literature
- US20160343550A1 END BLOCK ASSEMBLY, BEARING ASSEMBLY, AND METHOD FOR MANUFACTURING A BEARING ASSEMBLY Public/Granted day:2016-11-24
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