Invention Grant
- Patent Title: Semiconductor memory devices having vertical pillars that are electrically connected to lower contacts
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Application No.: US15706861Application Date: 2017-09-18
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Publication No.: US10043822B2Publication Date: 2018-08-07
- Inventor: TaeHee Lee , Kyoung-Hoon Kim , Hongsoo Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Priority: KR10-2015-0111751 20150807
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/11582

Abstract:
A semiconductor memory device may include an electrode structure including a selection line on a substrate and word lines between the substrate and the selection line, vertical pillars penetrating the electrode structure and being connected to the substrate, sub-interconnections and bit lines sequentially stacked on and electrically connected to the vertical pillars, and lower contacts connecting the vertical pillars to the sub-interconnections. The selection line may include a plurality of selection lines separated from each other in a first direction by an insulating separation layer, and central axes of the lower contacts connected in common to one of the sub-interconnections may be shifted, in a second direction across the first direction and parallel to a top surface of the substrate, from central axes of the vertical pillars thereunder.
Public/Granted literature
- US20180026049A1 SEMICONDUCTOR MEMORY DEVICES HAVING VERTICAL PILLARS THAT ARE ELECTRICALLY CONNECTED TO LOWER CONTACTS Public/Granted day:2018-01-25
Information query
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