Invention Grant
- Patent Title: TFT backplate structure and manufacture method thereof
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Application No.: US15655039Application Date: 2017-07-20
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Publication No.: US10043829B2Publication Date: 2018-08-07
- Inventor: Xiaowen Lv , Chihyuan Tseng , Chihyu Su , Hejing Zhang
- Applicant: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Shenzhen, Guangdong
- Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd
- Current Assignee Address: CN Shenzhen, Guangdong
- Agent Andrew C. Cheng
- Main IPC: H01L21/77
- IPC: H01L21/77 ; H01L27/12 ; H01L29/786 ; H01L27/32 ; H01L29/423

Abstract:
A method is provided for manufacturing a thin film transistor (TFT) backplate that includes a switch TFT and a drive TFT. The method is conducted such that each of the switch TFT and the drive TFT manufactured therewith includes a source electrode/a drain electrode and a gate electrode, and also includes an etching stopper layer, a semiconductor layer, and gate isolation layer that are disposed between the source electrode/the drain electrode and the gate electrode to form a TFT structure. The gate isolation layers of the switch TFT and drive TFT are formed of different materials, such as SiOx and Al2O3, or SiOx and SiNx, or Al2O3 and a mixture of SiNx and SiOx, such that electrical properties of the switch TFT and the drive TFT are made different.
Public/Granted literature
- US20170317113A1 TFT BACKPLATE STRUCTURE AND MANUFACTURE METHOD THEREOF Public/Granted day:2017-11-02
Information query
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