Invention Grant
- Patent Title: Monitoring laser beams
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Application No.: US15367904Application Date: 2016-12-02
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Publication No.: US10044167B2Publication Date: 2018-08-07
- Inventor: Joachim Schulz
- Applicant: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Applicant Address: DE Ditzingen
- Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Current Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Current Assignee Address: DE Ditzingen
- Agency: Fish & Richardson P.C.
- Main IPC: H01S3/13
- IPC: H01S3/13 ; H05G2/00 ; H01S3/00 ; H01S3/223 ; H01S3/23

Abstract:
A device includes a driver laser arrangement including a beam source for generating a laser beam and an amplifier arrangement for amplifying the laser beam. The device also includes an apparatus for monitoring the laser beam that includes a transmissive optical element having a normal direction oriented at a tilt angle with respect to a beam axis of the laser beam. The apparatus also includes a spatially resolving detector for registering laser radiation reflected backwards by the transmissive optical element. The transmissive optical element has first and second sides that are oriented at a wedge angle with respect to one another and through which the laser beam passes. The first and second sides reflect first and second partial beams of the incident laser beam. The apparatus has an optical filter that prevents one of the reflected first and second partial beams from reaching the detector.
Public/Granted literature
- US20170085054A1 Monitoring Laser Beams Public/Granted day:2017-03-23
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