Invention Grant
- Patent Title: Mutually induced filters
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Application No.: US14884401Application Date: 2015-10-15
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Publication No.: US10044338B2Publication Date: 2018-08-07
- Inventor: Sunil Kapoor , Aaron Logan , Hyungjoon Kim , Yaswanth Rangineni , Karl Leeser
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: H03H1/00
- IPC: H03H1/00 ; H02M1/44

Abstract:
A mutually induced filter for filtering radio frequency (RF) power from signals supplied to a load is described. The mutually induced filter includes a first portion connected to a first load element of the load for filtering RF power from one of the signals supplied to the first load element. The load is associated with a pedestal of a plasma chamber. The mutually induced filter further includes a second portion connected to a second load element of the load for filtering RF power from another one of the signals supplied to the second load element. The first and second portions are twisted with each other to be mutually coupled with each other to further facilitate a coupling of a resonant frequency associated with the first portion to the second portion.
Public/Granted literature
- US20170111025A1 MUTUALLY INDUCED FILTERS Public/Granted day:2017-04-20
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