- Patent Title: Microelectromechanical microphone having a stationary inner region
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Application No.: US14962182Application Date: 2015-12-08
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Publication No.: US10045126B2Publication Date: 2018-08-07
- Inventor: Renata Melamud Berger , Sushil Bharatan , Thomas Chen
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H04R7/20
- IPC: H04R7/20 ; H04R19/04 ; H04R19/00 ; H04R1/04

Abstract:
A microelectromechanical microphone has a stationary region or another type of mechanically supported region that can mitigate or avoid mechanical instabilities in the microelectromechanical microphone. The stationary region can be formed in a diaphragm of the microelectromechanical microphone by rigidly attaching, via a rigid dielectric member, an inner portion of the diaphragm to a backplate of the microelectromechanical microphone. The rigid dielectric member can extend between the backplate and the diaphragm. In certain embodiments, the dielectric member can be hollow, forming a shell that is centrosymmetric or has another type of symmetry. In other embodiments, the dielectric member can define a core-shell structure, where an outer shell of a first dielectric material defines an inner opening filled with a second dielectric material. Multiple dielectric members can rigidly attach the diaphragm to the backplate. An extended dielectric member can rigidly attach a non-planar diaphragm to a backplate.
Public/Granted literature
- US20170013363A1 MICROELECTROMECHANICAL MICROPHONE HAVING A STATIONARY INNER REGION Public/Granted day:2017-01-12
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