Invention Grant
- Patent Title: Rectifier diode
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Application No.: US14776455Application Date: 2014-02-25
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Publication No.: US10050140B2Publication Date: 2018-08-14
- Inventor: Alfred Goerlach
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102013204701 20130318
- International Application: PCT/EP2014/053596 WO 20140225
- International Announcement: WO2014/146870 WO 20140925
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/861 ; H01L29/06 ; H01L29/423 ; H01L29/49 ; H01L29/872

Abstract:
A pseudo-Schottky diode has an n-channel trench MOSFET which includes: a cathode, an anode, and located between the cathode and the anode, the following elements: a highly n+-doped silicon substrate; an n-doped epilayer having a trench extending into the n-doped epilayer from above; p-doped body regions provided above the n-doped epilayer and between the trenches. Highly n+-doped regions and highly p+-doped regions are provided on the upper surface of the p-doped body regions. Dielectric layers are provided on the side walls of the trench. The trench is filled with a first p-doped polysilicon layer, and the bottom of the trench is formed by a second p-doped layer which is in contact with the first p-doped polysilicon layer, and the second p-doped layer determines the breakdown voltage of the pseudo-Schottky diode.
Public/Granted literature
- US20160056284A1 RECTIFIER DIODE Public/Granted day:2016-02-25
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