Invention Grant
- Patent Title: Cu—Ga target, method of producing same, light-absorbing layer formed from Cu—Ga based alloy film, and CIGS system solar cell having the light-absorbing layer
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Application No.: US13988363Application Date: 2011-08-10
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Publication No.: US10050160B2Publication Date: 2018-08-14
- Inventor: Tomoya Tamura , Hiroyoshi Yamamoto , Masaru Sakamoto
- Applicant: Tomoya Tamura , Hiroyoshi Yamamoto , Masaru Sakamoto
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2011-006778 20110117
- International Application: PCT/JP2011/068235 WO 20110810
- International Announcement: WO2012/098722 WO 20120726
- Main IPC: H01L31/0272
- IPC: H01L31/0272 ; B22F3/14 ; C22C9/00 ; C22C28/00 ; C23C14/34 ; H01L31/032 ; H01L31/18 ; C22C1/04 ; B22F9/04

Abstract:
A Cu—Ga alloy sintered-compact sputtering target having a Ga concentration of 40 to 50 at % and Cu as the balance, wherein the sintered-compact sputtering target is characterized in that the relative density is 80% or higher, and the compositional deviation of the Ga concentration is within ±0.5 at % of the intended composition. A method of producing a Cu—Ga alloy sintered-compact sputtering target having a Ga concentration of 40 to 50 at % and Cu as the balance, wherein the method thereof is characterized in that Cu and Ga raw materials are melted and cooled/pulverized to produce a Cu—Ga alloy raw material powder, and the obtained material powder is further hot-pressed with a retention temperature being between the melting point of the mixed raw material powder and a temperature 15° C. lower than the melting point and with a pressure of 400 kgf/cm2 or more applied to the sintered mixed raw material powder. Provided are a sputtering target having very low compositional deviation and high density; a method of producing the target; a light-absorbing layer having a Cu—Ga based alloy film; and a CIGS solar cell including the light-absorbing layer.
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