A method of making patterned structured solid surfaces is disclosed that includes filling a structured template with backfill material to produce a structured transfer film, patternwise curing the backfill material to produce cured areas and uncured areas in the structured transfer film, and laminating the structured transfer film to a receptor substrate. The structured template is capable of being removed to form structured and unstructured backfill layers. The structured and unstructured backfill layers may then be blanket cured. The backfill layer can include at least two different materials, one of which can be an adhesion promotion layer. In some embodiments the backfill layer includes a silsesquioxane such as polyvinyl silsesquioxane. The structured transfer film is a stable intermediate that can be covered temporarily with a release liner for storage and handling.