Invention Grant
- Patent Title: Apparatus and method for coating with solid-state powder
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Application No.: US14903201Application Date: 2014-07-10
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Publication No.: US10053765B2Publication Date: 2018-08-21
- Inventor: Ok Min Kim , Ok Ryul Kim
- Applicant: FEMVIX CORP. , Ok Min Kim , Ok Ryul Kim
- Applicant Address: KR Yongin-si, Gyeonggi-do KR Yongin-si, Gyeonggi-do KR Yongin-si, Gyeonggi-do
- Assignee: FEMVIX CORP.,Ok Min Kim,Ok Ryul Kim
- Current Assignee: FEMVIX CORP.,Ok Min Kim,Ok Ryul Kim
- Current Assignee Address: KR Yongin-si, Gyeonggi-do KR Yongin-si, Gyeonggi-do KR Yongin-si, Gyeonggi-do
- Agency: Novick, Kim & Lee, PLLC
- Agent Sang Ho Lee
- Priority: KR10-2013-0081638 20130711; KR10-2014-0069017 20140609
- International Application: PCT/KR2014/006217 WO 20140710
- International Announcement: WO2015/005705 WO 20150115
- Main IPC: C23C8/60
- IPC: C23C8/60 ; C23C24/04

Abstract:
Provided is an apparatus and a method of spray-coating solid powder on a substrate disposed in a coating chamber which is in a vacuum state, and more particularly, to an apparatus and a method for coating solid powder, which are configured such that a gas sucked from an atmospheric pressure gas, together with a gas supplied from a gas supply unit, can be used as a carrier gas for transporting the solid powder.
Public/Granted literature
- US20160153082A1 APPARATUS AND METHOD FOR COATING WITH SOLID-STATE POWDER Public/Granted day:2016-06-02
Information query
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